Training Example: KLA – Review the Data, Give Your Score & Compare to the Real AI Evaluation

[H1] KLA announces March quarter earnings

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[H1] 50 Years of Innovation and Customer Success

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[H1] KLA is proud to be part of the Fortune America’s Most Innovative Companies 2026 list

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[H1] Expanding the Boundaries of AI

Explore AI

[H2] Who We Are
We’re at the nexus of electron and photon optics, sensor technology and artificial intelligence. From raw wafer to next-gen chip to world-altering idea, we help enable what’s next.
Company

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[H2] Working at KLA
KLA is a place for curiosity, intellectual challenges and industry transformation. Job overview: think big, drive progress, enjoy the journey.
Careers

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[H2] What We Make
We develop and manufacture process-control and process-enabling solutions that accelerate tomorrow’s electronic devices.
Products

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[H2] Investors
Our strong financial performance drives global innovation.
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[H2] Advance

Where do great ideas come from? At KLA, our global team of innovators brings forth new ideas, solutions and insights every day—strategies for how to help bring tomorrow’s technologies to life, shape the future and advance humanity. Connect with us here to get the latest KLA information as well as inspiration that can help you make a meaningful impact on the future.
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Innovation

[H3] Innovation Beyond the Chip: Exploring Advanced Packaging Architectures
May 13, 2026
For decades, the semiconductor industry relied on Moore’s Law—the idea that the number of transistors on a chip doubles roughly...
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Leadership

[H3] KLA Announces March Quarter Earnings
Apr 29, 2026
The infographic below highlights KLA’s key financial information from the earnings report for the March quarter. To read the full...
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Leadership

[H3] The Road Ahead Is Paved With 50 Years of Innovation and Customer Success
Mar 18, 2026
This year, KLA is celebrating 50 years of helping customers push the limits of semiconductor technology – driving advances that...
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[H2] Explore Technology Trends

[H3] Artificial Intelligence
AI helps make sense of big data! Our solutions use AI to accelerate production of the very ICs that will power the next generation of AI innovation.
Explore AI

[H3] Advanced Packaging
Semiconductor innovation thrives in advanced packaging. Our solutions help advance connectivity within tomorrow’s high-performance chips.
Explore Advanced Packaging

[H3] Automotive
Navigation, infotainment, driver assistance, autonomous driving! Our solutions revolutionize quality control for the ICs that power the future of automotive.
Explore Automotive

[H3] IoT
The Internet of Things is expanding quickly, and the demand for smart devices is growing with it! Our solutions drive increasing production to match it.
Explore IoT

[H1] Midwest Growth
Our new Ann Arbor campus, surrounded by natural beauty, is a growth center for the company’s next generation of products and talent.
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[H3] Company
We’re optimists. We create technology that energizes the world around us.
Rick Wallace
CEO
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[H3] News
May 13, 2026KLA Announces Upcoming Investor WebcastsMay 7, 2026KLA Corporation Announces Ten-to-One Stock Split and Quarterly Cash Dividend PaymentApril 29, 2026KLA Corporation Reports Fiscal 2026 Third Quarter Results News

[H1] Locations

[H3] North America

[H4] Arizona

444 S. Ellis St.Suite 3Chandler, AZ 85224Phone: 623-687-2700Fax: 623-687-2790
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20022 North 31st Avenue, Suite 102Phoenix, AZ 85027
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[H4] California

2260/2278 American Ave.Hayward, CA 94545-1815
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Filmetrics Headquarters10655 Roselle St.San Diego, CA 92121Phone: 858-573-9300Fax: 858-573-9400
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KLA Corporate Headquarters Three Technology DriveMilpitas, CA 95035
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[H4] Idaho
2141 West Airport Way, Suite 104Boise, ID 83705Phone: 208-672-7200Fax: 208-672-7199
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[H4] Massachusetts

60 Glacier DriveWestwood, MA 02090Phone: 781-467-3500Fax: 781-461-1637
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MicroSense, LLC205 Industrial Avenue EastLowell, MA 01852Phone: 978-843-7670Fax: 978-856-3375
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[H4] Michigan
1200 Woodridge AveAnn Arbor, MI 48105Phone: 734-510-6000
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[H4] New Jersey
60 Gordon DriveTotowa, NJ 07512Phone: 973-890-1114
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[H4] New Mexico
4135 Jackie RoadSuite 109Rio Rancho, NM 87124Phone: 505-796-1200Fax: 505-796-1230
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[H4] New York

2 Bayberry Dr.Suite 100Malta, NY 12020Phone: 518-245-1300Fax: 518-245-1399
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[H4] Oregon
2430 NE John Olsen AvenueSuite 100Beaverton, OR 97006Phone: 503-439-2000Fax: 503-466-1120
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[H4] Pennsylvania
7377 William Ave Suite 800 Allentown, PA 18106 Phone: 835-997-6020
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[H4] Texas

6300 Bridge Point PkwyBuilding 3Suite 400Austin, TX 78730Phone: 512-231-4200Fax: 512-342-6859
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4616 US-75 #105Denison, TX 75020Phone: 512-309-6519
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1717 Firman Road, 100Richardson, TX 75081Phone: 972-664-8300Fax: 972-690-0345
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111 W 3rd St #400Taylor, TX 76574Phone: 512-309-6519
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[H4] Tennessee
105 Meco LaneOak Ridge, TN 37830Fax: 888-381-5798
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[H4] Vermont
71 Knight LaneSuite 20AWilliston, VT 05495Phone: 802-318-9100Fax: 802-318-9115
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[H4] Virginia
10621 Gateway BlvdSuite 206Manassas, VA 20110Phone: 571-292-2892Fax: 408-252-2992
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[H4] Washington
3611 NE 112th AveSuite 100Vancouver, WA 98682
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[H3] International Sites

[H4] Austria
Europastrasse 89524 Villach, Austria
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[H4] Belgium
ICOS VISION SYSTEMS NVResearch Park Haasrode Zone 1Esperantolaan 8C3001 LeuvenBelgiumPhone: +32 16-398-220Fax: +32 16-400-067
Commercial support in EuropePhone: +32 16-398-220
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[H4] Mainland China

[H5] KLA SHANGHAI OFFICE
1st Floor No.71-72, No. 79-80 and 5th Floor No.88,
Lane 887, Zu Chongzhi Road Zhangjiang High Tech Park, Pudong District
Shanghai, China 201203
Phone:+86 21-38619788
Fax: +86 21-50271397

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[H5] KLA LKS SHANGHAI Training Center
1st Floor (C6-1), Zhongshi Building,
No.222 Kangnan Road, Pudong District
Shanghai, China 201203

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[H5] KLA WUHAN OFFICE
RM 501, Building C3, Future Technology City, No.999 Hi-tech Avenue, Jiangxia district
Wuhan, Hubei Province, China 430206
Phone:+86 27-59320677

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[H5] KLA HEFEI OFFICE
RM 1301-1304, Building B, Innovation International Plaza, Intersection of Chuangxin Avenue and Caihong
Road, Gaoxin District
Hefei, Anhui Province, China 230088
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[H5] KLA WUXI OFFICE
RM 1608-1611, No. 2 Building, No. 19 Est Gaolang Road, Xinwu District
Wuxi, Jiangsu Province, China, 214028
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[H5] KLA BEIJING OFFICE
RM 1901-1902, Building B,
No. 19 Ronghua Middle Road, Economic & Development Zone
Beijing, China 100176

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[H5] KLA TIANJIN OFFICE
RM 2705-2707, Block 1 Building 3 Junxi Huating, Intersection of Weijin Road and Wujiayao Street, Hexi District
Tianjin, China 300201

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[H5] KLA NANJING OFFICE
RM 305, No 4 Building,
CASTD Innovation Plaza, No 150 Pubin Road, Jiangbei New District
Nanjing, Jiangsu Province, China
Phone:+86 25-58720027

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[H5] KLA XIAMEN OFFICE
RM 707B, Qiangye Building,Torc
Development Zone (Xiang’an)
Xiamen, Fujian Province, China 361100
Phone:+86 0592-7623308
Fax：+86 0592-7623673

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[H5] KLA DALIAN OFFICE
RM 1107-1108, Jinma International Building, No. 1 Yongde Street, Development District
Dalian, Liaoning Province, China 116600

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[H5] KLA HANGZHOU OFFICE
RM 704, No. 2333 Xixing Road, XingLan Building
Hangzhou, Zhejiang Province, China 310008

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[H5] KLA XI’AN OFFICE
RM 1104-1105, Greenland Center
Building B, No.11 Jinye Road, Gaoxin District
Xi’an, Shanxi Province, China 710066
Phone:+86 029-68791979

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[H5] KLA SHANGHAI- Lingang OFFICE
RM 406, No.8, Lane 849/855
Huanhu West Yi Road, Nanhui New Town, Pudong District
Shanghai China 201306
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[H5] KLA SHANGHAI OFFICE
28F A2/B1/B3, East Building,
666 East Beijing Road
Shanghai, China
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[H5] KLA SHANGHAI-Hefei OFFICE
RM 1303, Building B, Cosmo City
No. 189, Changjiang West Road,
Hefei, Anhui, China 230031

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[H5] KLA SHANGHAI-Shenzhen OFFICE
2F & 3F Plant Building 2, 1F Plant Building 3 Jin Rong Da Science Technology & Industrial Park, Xue Gang
North Road
Ban Tian Street, Long Gang District
Shenzhen, China 518129
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[H5] KLA SHANGHAI-Hefei OFFICE
Building #69, No. 36 Yiwei Road,
Waigaoqiao Pilot Free Trade Zone,
Shanghai, PR China 200131

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[H4] Denmark
CAPRES A/SDiplomvej 373DK – 2800 Kgs. LyngbyDenmarkPhone: +45-88-82-14-70
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[H4] France

387 Av. Jean Kuntzmann38330 Montbonnot-Saint-MartinFrancePhone: +33 476181430
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24 Rue des Champs91830 Le Coudray-Montceaux, France
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Les Portes de RoussetAvenue Olivier Perroy – Bat D13790 RoussetFrancePhone: +33 4-4261-1230Fax: +33 4-4261-1229
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[H4] Germany

KLA-Tencor GmbHMoritzburger Weg 67 D-01109/ME No. BDresden, Germany+49 351-82802-0Fax +49 351-82802-20
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KLA-Tencor MIE GmbHKubacher Weg 4D-35781 Weilburg Germany+49 6471 910 0
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KLA-Tencor GmbHDresden City CenterDr.-Kuelz-Ring 1501067 DresdenPhone: +49 351 418 93 340
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Laser Imaging Systems GmbHFriedrich-Hund-Straße 3,07745 Jena, Germany
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Filmetrics Europe GmbH (KLA Instruments)Hauptstraße 42, 82008Unterhaching, GermanyPhone: +49 351 82802000
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[H4] India

KLA-Tencor Software India Private LimitedPrince Infocity Towers286/1 & 286/2Old Mahabalipuram RoadKottivakkam VillageKandanchavadiChennai – 600 096Phone: +91 44-4396-4000Fax: +91 44-4396-4949
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KLA-Tencor Software India Private LtdRMZ Ecoworld Infrastructure Private LtdRMBP2 – Campus 4B No.143,RMZ Millenia Business ParkDR. M.G.R Road, Perungudi VillageChennai – 600096Phone: +91 44 6124 0600
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KLA-Tencor Software India Private LtdAI & Advanced Computing LabsIIT Madras Research Park32, Kanagam Road, Kanagam,Tharamani,Chennai – 600113Tamilnadu
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KLA-Tencor Software India Private Limited14th Floor, DLF Downtown DT1, Jawaharlal Nehru Salainext to American International SchoolTharamani,Chennai – 600113TamilnaduPhone: +91 44-4396-4000
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[H4] Ireland

Building 1, 1st Floor, Kildare Innovation CampusBarnhall Rd, Leixlip, Co. Kildare, W23 Y972
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The Catalyst Innovation CentreBay RoadDerry-LondonderryBT48 7TG
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[H4] Israel

1 Halavian St.Migdal HaEmek, Israel 2353401Phone: +972 4-644-9449Fax: +972 4-644-9450
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5 Habarzel StreetP.O. Box 8621Gat 2000 Industrial ZoneKiryat Gat, Israel 82000
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7 Hasanhedrin Blvd.Yavne, Israel 8121507
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[H4] Italy

KLA-Tencor Italy S.r.lVia Paracelso, 2220864 Agrate Brianza (MB)ItalyPhone: +39 039
6057663
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Strada Ottava Zona Industriale, 8, 95121Catania CT, Italy
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Via Monte Hermada, 5,34170 Gorizia GO, Italy
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[H4] Japan

Ocean Gate Minatomirai 11F3-7-1 Minatomirai, Nishi-ku,Yokohama-city, Kanagawa220-0012
JapanPhone: +81 45-522-7000Fax: +81 45-225-8430
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Oak Logistics Center Eniwa 1F4-1-2, KitaKashiwagi-cho, Eniwa Hokkaido061-1433 JapanPhone: +81
45-522-7350Fax: +81 123-25-3200
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Kitakami Kaihatsu Building 2F1-3-1 Odori Kitakami-City,Iwate024-0061 JapanPhone: +81 197-62-4570Fax: +81 197-62-4571
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Tsuruoka SS building 3F,2-68 Nishikimachi, Tsuruoka-city, Yamagata997-0031 JapanPhone: +81 235-64-8381Fax: +81-235-24-7881
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Shirakawa Gate Building 3-141, Shin-shirakawa, Shirakawa-shi, Fukushima 961-0856 JapanPhone: +81 45-522-7810Fax: +81 248-27-8293
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YSG Toyama Center Bldg 9F,9-10 Hon-cho, Toyama-city, Toyama,930-0029 JapanPhone: +81 76-471-6671Fax: +81 76-420-7205
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Twin City Takasaki 6F,9 Azuma-cho, Takasaki-city, Gunma370-0045 JapanPhone: +81-45-522-7850Fax: +81-27-386-3988
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FORECAST YOKKAICHI 7F1-5-17 Unomori, Yokkaichi-city, Mie 510-0074 JapanPhone: +81-59-354-5373Fax: +81-59-354-5018
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A.I.T 1F 1300-3 Saijyohigashi Saijyo-choHigashihiroshima-city, Hiroshima739-0042 JapanPhone: +81 82-493-6570Fax: +81 82-493-6572
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Okamasa Second Building 2F, 103-3 Ko, Imari-cho, Imari-city, Saga 848-0047 JapanPhone: +81-955-29-8600Fax: +81-955-29-8630
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6-15 Harushin-machiOita-city, OitaJapanPhone: +81 975-03-1353Fax: +81 975-51-2523
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308 Tsukuba Estate Building, 121 Tsukuba-machi, Isahaya-city, Nagasaki 854-0065 JapanPhone: +81-957-46-5870Fax: +81-957-46-5871
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Sunree Carino Kikuyo 2F 2422-4 Tsukure, Kikuyo-machi, Kikuchi-gun, Kumamoto 869-1101 Japan Phone: +81 96-273-8610Fax: +81 96-273-8655
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[H4] Malaysia

Suite 1.03 1st FloorKHTP Business Centre,Kulim Hi-Tech Park09090 KulimKedah Darul AmanMalaysiaPhone: +02 04-4033471Fax: +02 04-4033472
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No 10-2,Jalan USJ9/5Q47620 UEP Subang JayaSelangor Darul EhsanMalaysiaPhone: +60 3-80242006Fax: +60 3-80242001
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[H4] Singapore

KLA LKS Singapore Training Center23 Serangoon North Avenue 5#01-01 BTC Center,Singapore 554530Phone +65 6367-6788Fax +65 6761-7686
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Manufacturing4 Serangoon North Avenue 5Singapore 554532
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EPC23 Serangoon North Avenue 5 #04-01Singapore 554369
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[H4] South Korea

14 & 15th Fl. SK V1 Center830, Dongtansunhwan-daeroHwaseong-si, Gyeonggi-do, South Korea (ZIP 18468)Phone: +82 31-728-9200Fax: +82 31-630-2299
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2nd Floor, S-Tower, 20 Buak-ro,Icheon-City, Gyeonggi-do, South Korea (ZIP 17379)Phone: +82 31-728-9200Fax: +82 31-631-0554
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7th Fl. Terasquare #722-727, 33 Daenong-ro, Heungdeok-gu,Cheongju- city, Chungcheongbuk-do, South Korea (ZIP 28424)Phone: +82 31-728-9200Fax: +82 43-231-6977
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8 & 9th Fl, SBC Business center Bldg.,118, Godeokyeoyeom-ro, Pyeongtaek-si, Gyeonggi-do, Republic of Korea (ZIP 18014) Phone: +82 31-728-9200Fax: +82 31-657-5092
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#605, Youngmumetro, Indongjungang 3-gil,Gyeongsangbuk-do, South Korea (ZIP 39430)Phone: +82 31-728-9000
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12, Daedeok-daero 578beon-gil,Yuseong-gu, Daejeon, Republic of Korea (ZIP 34121) Phone: +82 31 736 5893 Fax: +82 31-657-5092
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301, 120, Jeokgeum-ro,Danwon-gu, Ansan-si,Gyeonggi-do, Republic of Korea (ZIP 34121) Phone: +82 31-736-5893 Fax: +82 31-657-5092
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2-dong, 67, LCD-ro,Wollong-myeon, Paju-si,Gyeonggi-do, Republic of Korea (ZIP 10845) Phone: +82 31-736-5892 Fax: +82 31-657-5092
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D-dong, 481-26, Manghyang-ro,Seonggeo-eup, Seobuk-gu, Cheonan-si,Chungcheongnam-do, Republic of Korea (ZIP 31052) Phone: +82 41-566-9212 Fax: +82 31-657-5092
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Korea KLA Training Center4F, SurplusGlobal building,56, Seochon-ro,Namsa-eup, Cheoin-gu, Yongin-si,Gyeonggi-do, Republic of KoreaPhone: +82 31-783-0101
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[H4] Taiwan

[H5] Zhubei TYHT LKS
Floors 1 Bldg. C, No. 22 Taiyuan St.,Zhubei City, Hsinchu County 302082, Taiwan
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[H5] Hsinchu CWC Office
24F., No. 118, Ciyun Rd., East Dist.,Hsinchu City 300196 , Taiwan
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[H5] Taichung NTC Office
7F., No. 282, Shizheng N. 2nd Rd., Xitun Dist.,Taichung City 407608 , TaiwanPhone: +886 4-2217-1766Fax: +886 4-2254-0656
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[H5] Tainan STSP 9B Office
2F, No. 6, Chuangye Rd., Xinshi Dist.,Tainan City 744094, TaiwanPhone: +886 6-505-9199Fax: +886 6-505-0468
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[H5] Taoyuan Qingpu Office
5F No. 111, Sec. 2, Qingpu Rd., Zhongli Dist.,Taoyuan City 320016, Taiwan
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[H5] Taoyuan Gongyuan Office
11F., No. 30, Gongyuan Rd., Guishan Dist.,Taoyuan City 333004, Taiwan
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[H5] Kaohsiung Jing-Cheng Office
13F., No. 150, Bo’ai 2nd Rd., Zuoying Dist.,Kaohsiung City 813357, Taiwan
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[H5] Zhubei TYHT P9 Office (HQ office)
13F., No. 10 Taiyuen 2nd St., Zhubei City,Hsinchu County 302082, TaiwanPhone: +886 3-552-6128Fax: +886 3-552-6116
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[H5] Chiayi VOCO Office
13F-1,2, No. 791, Sec. 1, Shixian Rd., West Dist.Chiayi City 600083, Taiwan
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[H4] Thailand

No. 349 SJ Infinite I Business Complex, 20th FloorVibhavadi Rangsit Road, Chompol Sub-districtChatuchak District, Bangkok Metropolis
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[H4] United Kingdom

Celtic Way, Celtic Lakes, Newport NP10 8BEUnited KingdomPhone: +44 1633 832500
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Ringland Way, Newport NP18 2TA United KingdomPhone: +44 1633 414000
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c/o Catalyst Inc.1 Floor OfficeThe Innovation CenterBay RoadDerry~LondonderryBT48 7TG
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[H1] Reticle Manufacturing
An error-free reticle (also known as a photomask or mask) represents a critical element in achieving high semiconductor device yields, since reticle defects or pattern placement errors can be replicated in many die on production wafers. Reticles are built upon blanks: substrates of quartz deposited with absorber films. KLA's portfolio of reticle inspection, metrology and data analytics systems leverage leading-edge optical and sensor technologies and Al-driven algorithms to help blank, reticle and IC manufacturers identify reticle defects and pattern placement errors, thereby reducing yield risk.

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Service & Support
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Product Category

[H2] Products

[H2] Teron™ 6xx

[H4] Reticle Defect Inspection Systems for Mask Shop Applications
The Teron™ 640e reticle inspection product line advances the development and qualification of leading-edge EUV and 193nm patterned reticles in mask shops by detecting critical pattern and particle defects. Using die-to-database or die-to-die modes, these inspection systems are designed to handle the wide range of stack materials, curvilinear and complex OPC structures characteristic of the latest 2nm and beyond device nodes. The Teron™ 647eS2 incorporates several optics and image processing enhancements that support the defect capture specifications and throughput required to accelerate reticle manufacturing cycle times. Additionally, Teron 647eS2 uses the second-generation deep learning AI algorithm, X30, validated in 2nm customer production. The Teron 640e product line achieves the stringent cleanliness requirements necessary for production of EUV masks. Field upgrades to Teron 647eS2 are available for Teron 647e and Teron™ 647eS models.

Latest EUV inspection capability (X30)
High performance defect quality control for mask shops at 2nm and beyond
Next generation inline deep learning database X30 algorithm with multigon support
Next generation computing: new UIC and GPUs
Path and Multigon curvilinear support
Die-to-database and die-to-die capability
Athermal stage for improved temperature control
193nm reticle inspection with latest dual imaging (DI) and reticle plane imaging (RPI) capabilities
Improved signal and reduced noise
Improved cleanliness performance with XClean option

Reticle qualification, Reticle process control, Reticle process equipment monitoring, Outgoing reticle quality check

[H4] Teron 647e

Industry production standard for inspection of EUV reticles at the 7nm node and 5nm node reticles.

[H4] Teron 647eS

Industry production standard for inspection of EUV reticles at the 3nm node node reticles.

[H4] Teron 647eS2

Industry production standard for inspection of EUV reticles at the 2nm node reticles.

[H4] Teron 640

Industry production standard for inspection of optical and EUV reticles at the 10nm node and beyond.

[H4] Teron 630

Industry production standard for inspection of 1Xnm / 2XHP optical and EUV reticles.

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Download Your Free Product Brochure

[H2] Teron™ SL6xx

[H4] Reticle Defect Inspection Systems for IC Fab Applications
The Teron™ SL670e XP2 inspection system is used to assess incoming EUV reticle quality and to re-qualify EUV reticles periodically during production use and after reticle cleaning, helping chipmakers protect yield by reducing the risk of printing defective wafers. With innovative EUVGold™ and EUVMultiDie technologies, advanced focus tracking, and imaging flexibility, the Teron SL670e XP2 delivers the sensitivity required to monitor and detect yield-critical reticle defects on EUV reticles used for 2nm logic and advanced DRAM chip production. The Teron SL670e XP2 also has industry-leading production throughput, supporting the fast cycle times needed to qualify reticles during high-volume chip manufacturing. Inspection of advanced optical reticles is supported on the Teron SL670e XP2 with an option.

Teron SL670e Product Fact Sheet
Teron SL670e XP Product Fact Sheet

Reticle re-qualification, Incoming reticle quality check

[H4] Teron™ SL670e:

Inspection of EUV and optical (optional) reticles during chip manufacturing for 7nm/5nm design node IC technologies.

[H4] RA (Reticle Analyzer):

Reticle data analytics system for IC fabs supports applications such as automatic defect classification, lithography plane review and defect progression monitoring.

[H4] Teron™ SL655:

Inspection of optical reticles during chip manufacturing for 20nm design node IC technologies.

[H4] Teron™ SL650:

Inspection of optical reticles during chip manufacturing for 20nm design node IC technologies.

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[H2] TeraScan™ 597XRS

[H4] Reticle Defect Inspection Systems for Mask Shop Applications
The TeraScan™ 597XRS reticle inspection system is the most comprehensive, low-cost-of-ownership reticle defect inspection solution for ≥32 nm design rules. With sensitivity to detect classical defects (intrusions, extrusions, and point defects), the TeraScan 597XRS can inspect numerous reticle types including chrome-on-glass, sub-resolution optical proximity correction (OPC), embedded phase shift, and alternating phase shift, at both 248 nm and 193 nm wavelengths. Using deep ultraviolet (DUV) image acquisition with proven Tera inspection algorithms, TeraScan’s low false defect rate and high-speed pattern inspection make it ideal for pre- and post-pellicle pattern inspection in photomask manufacturing operations, and for incoming quality control in wafer fabs.

Reticle qualification, Reticle process control, Reticle process equipment monitoring, Outgoing reticle quality check

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[H2] X5.x™

[H4] Reticle Defect Inspection Systems for IC Fab Applications
The X5.x™ reticle inspection systems capture defects and pattern degradation required for early detection of haze and other progressive defects that occur unpredictably on masks in production in the fab. Because such defects threaten the yield of every subsequent lithographic field and wafer printed, early capturing the reticle defects before they are printed on the wafer is the best means of protecting yield. Once a contaminated reticle is cleaned, it is re-inspected to re-qualify it for the production line. Total ReQual extends reticle re-qualification beyond defect detection to incorporate other changes that may happen during a reticle’s lifetime in the fab. Degradation in the pattern from repeated cleaning or exposure may begin to narrow the process window. Early detection of changes to the mask pattern can be critical for maintaining device yield, performance and reliability. Lastly, many leading fabs use the X5.x reticle inspection systems to verify the specs of reticles delivered to the fab, to check for defects added during shipment, to benchmark vendors, or as part of a routine quality-control program.

Reticle re-qualification, Incoming reticle quality check

[H4] X5.2

CoO solution for reticle defects/degradation monitoring ≥2X nm design rule
Pixel flexibility and upgradeability options
STARlight™ mode provides superior coverage and performance on a wide variety of masks
iCDU option for Intensity-based CDU monitoring
Reticle Analyzer: Automated Defect Classification and Printability
Industry-proven 5xx platform

[H4] X5.3

Enhanced Productivity: Over 30% Faster scan time vs. X5.2
Field upgradeable from X5.2
Pixel flexibility and upgradeability options
Advanced multi-algo suite
STARlightMaps™ for CDU monitoring
Multiple productivity options for flexibility including pixels and modes
Industry-proven 5xx platform

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[H2] FlashScan®

[H4] Reticle Blank Defect Inspection Systems
The FlashScan® 211 mask blank defect inspection system supports mask shops and blank manufacturers in meeting mask blank defect requirements for optical and EUV lithography applications. The FlashScan 211 system pairs its high sensitivity with unparalleled inspection speed and automatic defect dispositioning, reducing the time to results for a wide range of applications.

Mask blank manufacturing, Mask blank qualification, Reticle process control, Reticle process equipment monitoring

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[H2] LMS IPRO

[H4] Reticle Pattern Registration Metrology Systems
The LMS IPRO7 reticle registration metrology system is designed to provide accurate and fast verification of the pattern placement performance on EUV and optical reticles for the 7nm design node. By offering comprehensive characterization of reticle pattern placement error, the LMS IPRO7 produces data used for e-beam mask writer corrections and reticle quality control during the development and production of advanced design node reticles. Using KLA’s proprietary model-based metrology algorithm, the LMS IPRO7 measures pattern placement error for both targets and multiple on-device pattern features with high accuracy, enabling characterization and reduction of reticle-related contributions to device overlay errors in the IC fab.

Reticle qualification, Outgoing reticle quality check, Mask writer qualification and monitoring, Reticle process monitoring, Wafer patterning control

[H4] LMS IPRO6:

Mask metrology system for the 10nm design node, supporting measurement on both standard registration marks and on-device pattern features.

[H4] LMS IPRO4:

Mask metrology system for the 32nm/28nm design nodes. With industry-unique flexible handling capability, the LMS IPRO4 supports mask sizes from 4” to 8”. Click the Contact Us button for more information about new and refurbished systems.

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[H2] MaskTemp™

[H4] In Situ Reticle Temperature Measurement System
The MaskTemp™ 2 in situ reticle temperature measurement system is used by mask shops for qualification and monitoring of e-beam writers and high temperature reticle process steps. The MaskTemp 2 serves a key role in the qualification of e-beam mask writers as extreme temperature stability is required over the extended time period (up to 24 hours) required to completely write a mask. Inside the e-beam mask writer, the MaskTemp 2 collects temperature data for 24 consecutive hours, providing mask manufacturers with the data needed to ensure the thermal stability of the system prior to writing critical masks. The MaskTemp 2 also supports post-exposure bake characterization, hot plate temperature uniformity monitoring, hot plate matching, and other high temperature process applications, helping mask manufacturers identify and reduce post-write process thermal variations that affect final reticle quality.

e-Beam mask writer qualification, Process development, Process control, Process qualification, Process monitoring, Process tool qualification, Process tool matching
e-Beam mask write | 20-40°C
Post-exposure bake | 20-140°C

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[H2] Software Solutions

KLA has several Software Solutions that support Reticle Manufacturing, including RDC and Klarity®
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[H1] Leadership
There’s an optimism that comes with looking five or ten years ahead—to the ideas that signal the
future. Our deep partnerships with innovative technology companies keep tomorrow’s innovations
on track.

[H2] Advancing Humanity
The future is ours to create. Whether it’s a driverless car, VR experience, or factory robotics, we help turn theory into possibility. We help create technological devices and ideas that transform our future and shape our current life.
KLA is proud to be part of the most significant technological breakthroughs. Virtually no laptop, smartphone, wearable device, voice-controlled gadget, VR device or smart car would have made it into your hands without us.

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We believe in the power of technology to make this world a brighter place. We are excited by all that humanity can achieve.

[H3] We Are
A global technology leader. We make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to our success.

[H3] We Provide
Leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Our solutions accelerate tomorrow’s electronic devices.

[H3] We Enable
The evolution and innovation in the data era across key industries including automotive, mobile and data center.

Business Snapshot
as of December 31, 2025

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[H2] 18

[H4] Regions

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[H2] ~15,000

[H4] Global Employees

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[H2] $12.75B

[H4] CY2025 Revenue

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[H2] $1.4B

[H4] CY2025 R&D

[H2] Why Join Us

[H3] Global Footprint

We are a multinational company with more than 15,000 employees and offices all around the world. We believe that innovation thrives in an environment built on communication, understanding, inclusive culture, skills and knowledge.

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[H3] Deep Science
We take on complex technical challenges that often take years to solve. We work on the edges of deep science, exploring electron and photon optics, sensors, machine learning and data analytics.
There is never a dull moment with us.

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[H3] Greater Together
Active collaboration multiplies agile thinking. Deep partnerships with innovative technology companies keep tomorrow’s innovations on track.
Together we maximize discovery and solutions.

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[H3] Investing in Innovation
The innovative ideas and devices that are transforming our world all begin with research, development and inspiration. Last year we invested $1.32B of sales back into R&D. That’s a measure of our commitment to solving the most daunting technical challenges.

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[H3] Opportunity Ahead
We believe in our people and make it our target to promote from within. Our CEO started as a KLA engineer. That’s pretty good proof that we’re a company of opportunity.

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[H2] How We Do It
We inhabit two worlds: one that’s nanometers in scale and one that’s global. This micro
and macro view gives us a unique perspective. We see electrons wave and industries transform.
When you put deep science together with optimism, big things happen.

[H3] Expertise
Last year we invested 1.32B in R&D. That’s a measure of our commitment to
solving the most daunting technical challenges. From our ground-breaking mask inspection
tool in 1975 that signaled the dawn of semiconductor process control, to today’s broadband
plasma technology that discovers defects at the speed of light, we like to arrive first.

[H3] Collaboration
Active collaboration multiplies agile thinking. We put this approach into practice at
strategic, technical and operational levels with our partners. Working side-by-side both
geographically and intellectually, we maximize discovery and solutions.

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[H3] Operations
We have a proven ability to go from concept to global marketplace. We invent in-house, make
strategic acquisitions and share technology across systems to diversify our perspectives
and widen the range of our solutions. Comprehensive service programs keep it all optimized.

[H2] Company Highlights

Leadership

[H3] KLA Announces March Quarter Earnings
Apr 29, 2026
The infographic below highlights KLA’s key financial information from the earnings report for the March quarter. To read the full...
Read more

Leadership

[H3] The Road Ahead Is Paved With 50 Years of Innovation and Customer Success
Mar 18, 2026
This year, KLA is celebrating 50 years of helping customers push the limits of semiconductor technology – driving advances that...
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Leadership

[H3] KLA Rings NASDAQ Bell, Celebrating 50 Years of Innovation
Mar 18, 2026
On Thursday, March 12, KLA executives and employees concluded the KLA 2026 Investor Day with a visit to NASDAQ in...
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Leadership

[H3] KLA Announces December Quarter Earnings
Jan 29, 2026
The infographic below highlights KLA’s key financial information from the earnings report for the December quarter. To read the full...
Read more

Leadership

[H3] Celebrating a Year of Industry Excellence: KLA’s Global Awards
Dec 18, 2025
In 2025, leading publications and organizations recognized KLA’s business performance, leadership excellence, and corporate responsibility. These prestigious honors highlight KLA’s...
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Leadership

[H3] KLA Announces September Quarter Earnings
Oct 29, 2025
The infographic below highlights KLA’s key financial information from the earnings report for the September quarter. To read the full...
Read more

Visit KLA Advance

[H2] Foundation
We support a range of community and charitable initiatives with funding and volunteer
opportunities: STEM education, health and wellness programs, local aid and international
disaster relief. We sponsor the Second Harvest Food Bank in Santa Clara County and fight river
blindness in Africa. Not for profit, just for humanity.
[H4] Make the World a Better Place
We believe that technology has a meaningful and positive impact on the world. How technology can change our societies for the better? What greater good can be achieved by harnessing exceptional thinking to promote exponential technological innovation? Those are the questions that inspire us to evolve. Discover How You Can Advance Humanity.
KLA
Foundation

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[H2] Global Impact
Making an impact by creating solutions that drive progress and transform industries has long been a part of the KLA DNA, and we remain committed to our purpose in everything we do – through leadership, opportunity, innovation and stewardship.
Learn More

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[H3] Anti-Bribery Policy
Compliance with all anti-bribery and anti-corruption laws is a mandate for all our business
partners
Download Our Policy
View Our Anti-Bribery Video

[H3] Environmental, Health & Safety Policy
KLA is dedicated to complying with the appropriate and relevant environmental, health & safety laws and standards such that its worldwide operations, including product development, sales, service and maintenance, are conducted in an environmentally responsible manner.
Download Our Policy
View Our ISO 9001 Certificate
View Our ISO 14001 Certificate
View Our ISO 45001 Certificate
View Our Take-Back and Recycling in the EU—WEEE Policy

[H3] Supply Chain Product Compliance
We actively seek to foster business relationships with suppliers who offer goods and services that meet KLA’s standards including product regulatory requirements and anti-virus requirements.
Download our Product Regulatory Compliance Guidelines
Download our Anti-virus Policy Information

[H3] Reporting Portal
We all have the responsibility to report any behavior that violates our Standards of Business Conduct (SoBC). You are encouraged to ask questions, seek guidance, report suspected violations and express any concerns about compliance with your KLA contact or via our EthicsPoint reporting portal.
Visit EthicsPoint

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[H3] Suppliers
KLA works closely with its supply chain to drive innovation, partnership and continuous improvement.
Learn more about KLA Supply Chain Information